Research on hybrid integration technology between charge-coupled devices and diffractive microlens arrays
Ke, Caijun, Yi, Xinjian, Lai, Jianjun, Chen, SihaiVolume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/1/017
Date:
January, 2004
File:
PDF, 178 KB
english, 2004