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Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification
Deladi, S, Berenschot, J W, Tas, N R, Krijnen, G J M, Boer, J H de, Boer, M J de, Elwenspoek, M CVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/3/013
Date:
March, 2005
File:
PDF, 697 KB
english, 2005