A three-dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips
Gollasch, C O, Moktadir, Z, Kraft, M, Trupke, M, Eriksson, S, Hinds, E AVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/7/006
Date:
July, 2005
File:
PDF, 1.70 MB
english, 2005