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Two-dimensional analysis of temperature-gradient actuation of cantilever beam resonators
Mahameed, Rashed, Elata, DavidVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/8/006
Date:
August, 2005
File:
PDF, 362 KB
english, 2005