Hydroinertia gas bearings for micro spinners
Hikichi, Kousuke, Goto, Satoshi, Togo, Shinichi, Tanaka, Shuji, Isomura, KousukeVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/9/S09
Date:
September, 2005
File:
PDF, 217 KB
english, 2005