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Mechanical properties of sacrificial polymers used in RF-MEMS applications
Stanec, James R, Begley, Matthew R, Barker, N ScottVolume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/10/023
Date:
October, 2006
File:
PDF, 200 KB
english, 2006