Simulation and fabrication of SiO 2...

Journal of Micromechanics and Microengineering 2006 / 04 Vol. 16; Iss. 4

Simulation and fabrication of SiO 2 -based piezoresistive microbridges for chem/biosensors

Lu, Yanqing, Chivukula, Venkata, Wang, Ming, Ji, Hai-Feng
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/4/004
Date:
April, 2006
File:
PDF, 318 KB
english, 2006
Conversion to is in progress
Conversion to is failed