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Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask
Haneveld, Jeroen, Berenschot, Erwin, Maury, Pascale, Jansen, HenriVolume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/6/S05
Date:
June, 2006
File:
PDF, 665 KB
english, 2006