Ultra-thick micro-optical components using the PRISM photosensitive flexopolymer
Sayah, Abdeljalil, Parashar, Virendra K, Sivagnanam, Venkataragavalu, Gijs, Martin A MVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/10/025
Date:
October, 2007
File:
PDF, 1.39 MB
english, 2007