Fabrication techniques of convex corners in a (1 0 0)-silicon wafer using bulk micromachining: a review
Pal, Prem, Sato, Kazuo, Chandra, SudhirVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/10/R01
Date:
October, 2007
File:
PDF, 1.84 MB
english, 2007