Analysis of a three-dimensional particle velocity sensor for design optimization
Honschoten, J W van, Yntema, D R, Wiegerink, R J, Elwenspoek, MVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/S11
Date:
July, 2007
File:
PDF, 633 KB
english, 2007