An in-plane thermal unimorph using confined polymers

Journal of Micromechanics and Microengineering 2007 / 07 Vol. 17; Iss. 7

An in-plane thermal unimorph using confined polymers

Lau, G K, Duc, T Chu, Goosen, J F L, Sarro, P M, Keulen, F van
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/S15
Date:
July, 2007
File:
PDF, 992 KB
english, 2007
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