FEM assisted calibration of a MEMS-based dispensing system...

Journal of Micromechanics and Microengineering 2008 / 01 Vol. 18; Iss. 1

FEM assisted calibration of a MEMS-based dispensing system with integrated piezoresistive force sensors

Lishchynska, Maryna, Leïchlé, Thierry, Nicu, Liviu
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Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/1/015010
Date:
January, 2008
File:
PDF, 1.04 MB
english, 2008
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