Surface and subsurface damages in nanoindentation tests of compound semiconductor InP
Yan, Jiwang, Tamaki, Jun'ichi, Zhao, Hongwei, Kuriyagawa, TsunemotoVolume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/10/105018
Date:
October, 2008
File:
PDF, 1.38 MB
english, 2008