Continuum-based multi-physical analysis and fabrication...

Journal of Micromechanics and Microengineering 2008 / 03 Vol. 18; Iss. 3

Continuum-based multi-physical analysis and fabrication experiment of laser-assisted direct imprinting

Wang, Di-Bao, Lee, Yung-Chun, Hsiao, Fei-Bin, Ruan, Jun-Yi, Chung, Ming-Hung
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Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/3/035030
Date:
March, 2008
File:
PDF, 1.81 MB
english, 2008
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