A low-drift, open-loop controlled, single crystalline...

Journal of Micromechanics and Microengineering 2008 / 03 Vol. 18; Iss. 3

A low-drift, open-loop controlled, single crystalline silicon micromirror with floating field-limiting shields

Yoo, Byung-Wook, Park, Jae-Hyoung, Jang, Yun-Ho, Kim, Yong-Kweon
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Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/3/035031
Date:
March, 2008
File:
PDF, 1.54 MB
english, 2008
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