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Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures
Tsai, Jui-che, Hsieh, Tien-liang, Liao, Chun-da, Chiou, Sheng-jie, Hah, Dooyoung, Wu, Ming CVolume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/4/045002
Date:
April, 2009
File:
PDF, 1.11 MB
english, 2009