Surface micromachining

Journal of Micromechanics and Microengineering 1992 / 09 Vol. 2; Iss. 3

Surface micromachining

Linder, C, Paratte, L, Gretillat, M -A, Jaecklin, V P, Rooij, N F de
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Volume:
2
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/2/3/003
Date:
September, 1992
File:
PDF, 1.42 MB
english, 1992
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