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A thermopneumatically actuated bistable microvalve
Yang, Bocong, Wang, Boxiong, Schomburg, Werner KarlVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/9/095024
Date:
September, 2010
File:
PDF, 1.56 MB
english, 2010