CAD tools for micromechanics

CAD tools for micromechanics

Sandmaier, H, Offereins, H L, Folkmer, B
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Volume:
3
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/3/3/001
Date:
September, 1993
File:
PDF, 415 KB
english, 1993
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