CAD tools for micromechanics
Sandmaier, H, Offereins, H L, Folkmer, BVolume:
3
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/3/3/001
Date:
September, 1993
File:
PDF, 415 KB
english, 1993