3D silicon electrostatic microactuator

Journal of Micromechanics and Microengineering 1993 / 09 Vol. 3; Iss. 3

3D silicon electrostatic microactuator

Tirole, N, Hauden, D, Blind, P, Froelicher, M, Gaudriot, L
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
3
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/3/3/016
Date:
September, 1993
File:
PDF, 290 KB
english, 1993
Conversion to is in progress
Conversion to is failed