Analysis and modelling of a silicon micromachined Mach -...

Journal of Micromechanics and Microengineering 1997 / 09 Vol. 7; Iss. 3

Analysis and modelling of a silicon micromachined Mach - Zehnder interferometer for pressure sensing

Pavelescu, Ioan, Müller, Raluca, Moagar-Poladian, Victor
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Volume:
7
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/7/3/035
Date:
September, 1997
File:
PDF, 602 KB
english, 1997
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