A three-dimensionally silicon-micromachined fluidic...

Journal of Micromechanics and Microengineering 1998 / 03 Vol. 8; Iss. 1

A three-dimensionally silicon-micromachined fluidic amplifier device

Kim, Tae-Hyun, Cho, Chang-Ho, Cho, Dong-Il Dan
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Volume:
8
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/8/1/002
Date:
March, 1998
File:
PDF, 667 KB
english, 1998
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