Partial-depth modulation study of anions and neutrals in...

Plasma Sources Science and Technology 1996 / 05 Vol. 5; Iss. 2

Partial-depth modulation study of anions and neutrals in low-pressure silane plasmas

Courteille, C, Dorier, J-L, Hollenstein, Ch, Sansonnens, L, Howling, A A
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Volume:
5
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/5/2/014
Date:
May, 1996
File:
PDF, 189 KB
english, 1996
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