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Plasma etching of thermoset polymer films for microchannels
Holland, Anthony, Cher, Carla, Rosengarten, Gary, Simon, DarrenVolume:
15
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/15/1/017
Date:
February, 2006
File:
PDF, 408 KB
english, 2006