Neural networks for the simulation of photoresist exposure process in integrated circuit fabrication
Mardiris, V, Karafyllidis, I, Soudris, D, Thanailakis, AVolume:
5
Language:
english
Journal:
Modelling and Simulation in Materials Science and Engineering
DOI:
10.1088/0965-0393/5/5/001
Date:
September, 1997
File:
PDF, 182 KB
english, 1997