Properites of hydrogenated amorphous silicon carbide films irradiated by excimer pulse laser
Li, Wang, Tian-fu, Ma, Xin-fan, Huang, Jun, Xu, Qi-liang, Li, Zhuang-chun, Wu, Kun-ji, ChenVolume:
7
Language:
english
Journal:
Acta Physica Sinica (Overseas Edition)
DOI:
10.1088/1004-423X/7/12/008
Date:
December, 1998
File:
PDF, 355 KB
english, 1998