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Noise and sensitivity in polysilicon piezoresistive cantilevers
Xiao-mei, Yu, Xing-liu, Jiang, Thaysen, J, Hansen, O, Boisen, AVolume:
10
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/10/10/307
Date:
October, 2001
File:
PDF, 291 KB
english, 2001