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An improved model for the cantilever NEMS actuator including the surface energy, fringing field and Casimir effects
Farrokhabadi, Amin, Mohebshahedin, Abed, Rach, Randolph, Duan, Jun-ShengVolume:
75
Language:
english
Journal:
Physica E: Low-dimensional Systems and Nanostructures
DOI:
10.1016/j.physe.2015.09.033
Date:
January, 2016
File:
PDF, 748 KB
english, 2016