![](/img/cover-not-exists.png)
Atomic Layer Deposition from Dissolved Precursors
Wu, Yanlin, Döhler, Dirk, Barr, Maïssa, Oks, Elina, Wolf, Marc, Santinacci, Lionel, Bachmann, JulienLanguage:
english
Journal:
Nano Letters
DOI:
10.1021/acs.nanolett.5b01424
Date:
September, 2015
File:
PDF, 2.93 MB
english, 2015