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Sol–gel processing for epitaxial growth of ZrO2 thin films on Si(100) wafers
Seung-Young Bae, Hyun-Seok Choi, Se-Young Choi, Young-Jei OhVolume:
26
Year:
2000
Language:
english
Pages:
2
DOI:
10.1016/s0272-8842(99)00043-7
File:
PDF, 230 KB
english, 2000