Dilution-enhanced radical generation in silane glow discharges
Mataras, D, Coutelieris, F, Kounavis, P, Rapakoulias, D EVolume:
29
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/29/9/033
Date:
September, 1996
File:
PDF, 245 KB
english, 1996