Diagnostics of magnetically enhanced RF discharges in methane, argon and methane - argon mixtures
Avtaeva, S V, Mamytbekov, M Z, Otorbaev, D KVolume:
30
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/30/21/014
Date:
November, 1997
File:
PDF, 313 KB
english, 1997