The effects of applied bias voltage on structure and hydrogen content of a-C:H films
Xu, Niankan, Yin, Dachuan, Liu, Zhengtang, Zheng, XiulinVolume:
30
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/30/5/007
Date:
March, 1997
File:
PDF, 160 KB
english, 1997