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Study of carbon nitride films deposited using a Hall-type ion source
Bacal, M, Perrière, J, Tanguy, M, Vesselovzorov, A N, Maslakov, K I, Dementjev, A PVolume:
33
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/33/19/305
Date:
October, 2000
File:
PDF, 257 KB
english, 2000