Systematic simulations of plasma structures in chlorine...

Systematic simulations of plasma structures in chlorine radio frequency discharges

Kawano, Satoyuki, Nanbu, Kenichi, Kageyama, Junichi
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Volume:
33
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/33/20/316
Date:
October, 2000
File:
PDF, 317 KB
english, 2000
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