Systematic simulations of plasma structures in chlorine radio frequency discharges
Kawano, Satoyuki, Nanbu, Kenichi, Kageyama, JunichiVolume:
33
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/33/20/316
Date:
October, 2000
File:
PDF, 317 KB
english, 2000