A `blurred film' model in polarized light reflectometry for characterization of thick films and surface layers
Vitlina, R Z, Surdutovich, G IVolume:
34
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/34/17/304
Date:
September, 2001
File:
PDF, 115 KB
english, 2001