Implantation dynamics of plasma implantation into...

Journal of Physics D Applied Physics 2004 / 01 Vol. 37; Iss. 1

Implantation dynamics of plasma implantation into insulating strips

Tian, Xiubo, Yang, Shiqin, Huang, Yongxian, Chu, Paul K, Fu, Ricky K Y
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Volume:
37
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/37/1/009
Date:
January, 2004
File:
PDF, 289 KB
english, 2004
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