Simulation of ion transport characteristics in a collisionless rf sheath
Liu, Zu-li, Jing, Xing-bin, Yao, Kai-lunVolume:
38
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/38/12/008
Date:
June, 2005
File:
PDF, 602 KB
english, 2005