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Synthesis of buried SiC using an energetic ion beam
Katharria, Y S, Kumar, Sandeep, Singh, F, Pivin, J C, Kanjilal, DVolume:
39
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/39/18/007
Date:
September, 2006
File:
PDF, 282 KB
english, 2006