Investigation on the initial growth of nanocrystalline silicon prepared from hydrogen-diluted SiCl 4 at low temperatures
Huang, Rui, Lin, Xuanying, Yu, Yunpeng, Lin, Kuixun, Zhu, Zusong, Wei, Junhong, Chen, KunjiVolume:
39
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/39/20/019
Date:
October, 2006
File:
PDF, 498 KB
english, 2006