The role of backscattered energetic atoms in film growth in...

Journal of Physics D Applied Physics 2007 / 02 Vol. 40; Iss. 3

The role of backscattered energetic atoms in film growth in reactive magnetron sputtering of chromium nitride

Sarakinos, K, Alami, J, Karimi, P M, Severin, D, Wuttig, M
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Volume:
40
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/40/3/014
Date:
February, 2007
File:
PDF, 302 KB
english, 2007
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