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Epitaxially stabilized TiN/(Ti,Fe,Co)N multilayer thin films in (pseudo-)fcc crystal structure by sequential magnetron sputter deposition
Klever, C, Seemann, K, Stüber, M, Ulrich, S, Brunken, H, Ludwig, A, Leiste, HVolume:
43
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/43/39/395406
Date:
October, 2010
File:
PDF, 946 KB
english, 2010