Microstructural Characterization for Ge Clusters Embedded...

Chinese Physics Letters 1994 / 04 Vol. 11; Iss. 4

Microstructural Characterization for Ge Clusters Embedded in a-SiN y Matrix Prepared by PECVD Method

Qu, Xuexuan, Chen, Kunji, Wang, Mingxiang, Li, Zhifeng, Xia, Hua, Feng, Duan
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Volume:
11
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/11/4/017
Date:
April, 1994
File:
PDF, 480 KB
english, 1994
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