Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma
Yang, Yun, Wu, Han-mingVolume:
13
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/13/6/013
Date:
June, 1996
File:
PDF, 303 KB
english, 1996