Cubic Boron Nitride Films with Low Stress
Zhao, Yong-nian, Zou, Guang-tian, He, Zhi, Zhu, Pin-wen, Wang, Xue-jin, Zhao, BingVolume:
16
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/16/2/028
Date:
February, 1999
File:
PDF, 278 KB
english, 1999