Tuning Effect on the Electron Energy Distribution Function...

Chinese Physics Letters 2003 / 09 Vol. 20; Iss. 9

Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in nitrogen Inductively Coupled Plasma Discharges

Jie, Ma, Yi-Kang, Pu
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Volume:
20
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/20/9/334
Date:
September, 2003
File:
PDF, 194 KB
english, 2003
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