Growth of Nanocrystalline Silicon Films by Helicon Wave...

Chinese Physics Letters 2004 / 07 Vol. 21; Iss. 7

Growth of Nanocrystalline Silicon Films by Helicon Wave Plasma Chemical Vapour Deposition

Wei, Yu, Bao-Zhu, Wang, Wan-Bing, Lu, Yan-Bin, Yang, Li, Han, Guang-Sheng, Fu
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Volume:
21
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/21/7/038
Date:
July, 2004
File:
PDF, 247 KB
english, 2004
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