Analysis of X-Ray Photoelectron Spectroscopy of Polymethyl Methacrylate Etched by a KrF Excimer Laser
Xiao-Li, Zhu, Shi-Bing, Liu, Tao, Chen, Yi-Jian, Jiang, Tie-Chuan, ZuoVolume:
22
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/22/6/063
Date:
June, 2005
File:
PDF, 214 KB
english, 2005