Determination of Tungsten Layer Profiles in Bilayer...

Chinese Physics Letters 2007 / 02 Vol. 24; Iss. 2

Determination of Tungsten Layer Profiles in Bilayer Structures Using X-Ray Reflectivity Method

Yao, Xu, Zhan-Shan, Wang, Bei, Wang, Hong-Chang, Wang, Wen-Juan, Wu, Shu-Min, Zhang, Zhong, Zhang, Feng-Li, Wang, Shu-Ji, Qin, Ling-Yan, Chen
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Volume:
24
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/24/2/018
Date:
February, 2007
File:
PDF, 233 KB
english, 2007
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